| 6766813 |
Apparatus and method for cleaning a wafer |
Dhiraj Sardar, Frederick J. Barrera, Raylon M. Yow |
2004-07-27 |
| 5772769 |
Apparatus for coating a workpiece with fluid contamination detection |
— |
1998-06-30 |
| 5743135 |
Optical-fiber liquid-level monitor |
Robert J. Rocks |
1998-04-28 |
| 5668452 |
Magnetic sensing robotics for automated semiconductor wafer processing systems |
Danine Villarreal |
1997-09-16 |
| 5631799 |
Fusion heat sink for integrated circuit |
— |
1997-05-20 |
| 5558902 |
Method for detecting contaminants carried by a fluid |
Patricia A. Vargas |
1996-09-24 |
| 5509375 |
Apparatus and method for detecting contaminants carried by a fluid |
Patricia A. Vargas |
1996-04-23 |
| 5477409 |
Fusion heat sink for integrated circuit |
— |
1995-12-19 |
| 5472825 |
Metal interconnect fabrication with dual plasma silicon dioxide deposition and etchback |
— |
1995-12-05 |
| 5392113 |
Semiconductor wafer defect monitoring |
Stacy W. Hall, Judy Galloway, Pierre Leroux, Bryan D. Schmidt, Daniel David Siems +2 more |
1995-02-21 |
| 5349237 |
Integrated circuit package including a heat pipe |
Mohammad Amir Siddiqui |
1994-09-20 |
| 5313818 |
Contaminant monitor for a flowing liquid |
Christopher D. Reynes, Bradley G. Williams, Gerardo F. Martinez |
1994-05-24 |
| 5312039 |
Electro-optic monitor for fluid spray pattern |
Allen Page |
1994-05-17 |
| 5310621 |
Semiconductor photolithography with superficial plasma etch |
— |
1994-05-10 |
| 5284801 |
Methods of moisture protection in semiconductor devices utilizing polyimides for inter-metal dielectric |
Allen Page |
1994-02-08 |
