Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5876883 | Method forming focus/exposure matrix on a wafer using overlapped exposures | — | 1999-03-02 |
| 5856052 | Wafer with a focus/exposure matrix | — | 1999-01-05 |
| 5830610 | Method for measuring alignment accuracy in a step and repeat system utilizing different intervals | David Ziger | 1998-11-03 |
| 5780208 | Method and mask design to minimize reflective notching effects | David Ziger | 1998-07-14 |
| 5762688 | Particle removal wafer | David Ziger | 1998-06-09 |
| 5407785 | Method for generating dense lines on a semiconductor wafer using phase-shifting and multiple exposures | — | 1995-04-18 |
| 5392113 | Semiconductor wafer defect monitoring | Anthony Sayka, Stacy W. Hall, Judy Galloway, Bryan D. Schmidt, Daniel David Siems +2 more | 1995-02-21 |
| 5350428 | Electrostatic apparatus and method for removing particles from semiconductor wafers | Bryan D. Schmidt | 1994-09-27 |