Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6060715 | Method and apparatus for ion beam scanning in an ion implanter | Andrew Holmes | 2000-05-09 |
| 5969366 | Ion implanter with post mass selection deceleration | Stephen Moffatt, David George Armour, Majeed A. Foad | 1999-10-19 |
| 5932882 | Ion implanter with post mass selection deceleration | Babak Adibi, Mitchell Taylor | 1999-08-03 |
| 5883391 | Ion implantation apparatus and a method of monitoring high energy neutral contamination in an ion implantation process | Babak Adibi, Stephen Moffatt, Jose Antonio Marin | 1999-03-16 |
| 5399871 | Plasma flood system for the reduction of charging of wafers during ion implantation | Hiroyuki Ito, Frederick Plumb, Ian Fotheringham | 1995-03-21 |