Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362714 | Architecture for all-fiber delivery of coherently combined laser power | Gregory D. Goodno, Joshua E. Rothenberg | 2016-06-07 |
| 6973164 | Laser-produced plasma EUV light source with pre-pulse enhancement | Jeffrey S. Hartlove, Mark E. Michaelian, Samuel Talmadge, Steven W. Fornaca, Armando Martos | 2005-12-06 |
| 6933515 | Laser-produced plasma EUV light source with isolated plasma | Jeffrey S. Hartlove, Mark E. Michaelian, Steven W. Fornaca, Stuart McNaught, Fernando Martos +1 more | 2005-08-23 |
| 6912267 | Erosion reduction for EUV laser produced plasma target sources | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Roy D. McGregor, Steven W. Fornaca | 2005-06-28 |
| 6855943 | Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source | — | 2005-02-15 |
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Roy D. McGregor, Steven W. Fornaca | 2004-12-28 |
| 6016324 | Short pulse laser system | Harry Rieger, Richard M. Foster | 2000-01-18 |
| 5940418 | Solid-state laser system for ultra-violet micro-lithography | — | 1999-08-17 |
| 5790574 | Low cost, high average power, high brightness solid state laser | Harry Rieger, Richard M. Foster | 1998-08-04 |
| 5742634 | Picosecond laser | Harry Rieger, Richard M. Foster | 1998-04-21 |
| 5539764 | Laser generated X-ray source | Michael Powers | 1996-07-23 |
| 5491707 | Low cost, high average power, high brightness solid state laser | Harry Rieger, Richard M. Foster | 1996-02-13 |
| 5434875 | Low cost, high average power, high brightness solid state laser | Harry Rieger, Richard M. Foster | 1995-07-18 |
| 5089711 | Laser plasma X-ray source | Arthur Lee Morsell | 1992-02-18 |
| 5003543 | Laser plasma X-ray source | Arthur Lee Morsell | 1991-03-26 |