Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973164 | Laser-produced plasma EUV light source with pre-pulse enhancement | Jeffrey S. Hartlove, Mark E. Michaelian, Henry Shields, Samuel Talmadge, Armando Martos | 2005-12-06 |
| 6933515 | Laser-produced plasma EUV light source with isolated plasma | Jeffrey S. Hartlove, Mark E. Michaelian, Henry Shields, Stuart McNaught, Fernando Martos +1 more | 2005-08-23 |
| 6912267 | Erosion reduction for EUV laser produced plasma target sources | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor | 2005-06-28 |
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor | 2004-12-28 |
| 6792076 | Target steering system for EUV droplet generators | Michael B. Petach, Rocco A. Orsini | 2004-09-14 |
| 6479830 | Low-sputter-yield coating for hardware near laser-produced plasma | Samuel Talmadge | 2002-11-12 |
| 5999122 | Millimeter wave instant photographic camera | Merit M. Shoucri, Mikio L. Yujiri | 1999-12-07 |
| 5789622 | Focal plane array calibration method | Bill Quon, Paul S. C. Lee, Karen E. Yokoyama | 1998-08-04 |