Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6973164 | Laser-produced plasma EUV light source with pre-pulse enhancement | Jeffrey S. Hartlove, Mark E. Michaelian, Henry Shields, Steven W. Fornaca, Armando Martos | 2005-12-06 |
| 6876296 | Smart license tag system | Gregory A. Shreve, Katherine E. MacQueen | 2005-04-05 |
| 6479830 | Low-sputter-yield coating for hardware near laser-produced plasma | Steven W. Fornaca | 2002-11-12 |