Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6912267 | Erosion reduction for EUV laser produced plasma target sources | Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2005-06-28 |
| 6864497 | Droplet and filament target stabilizer for EUV source nozzles | Michael B. Petach, Roy D. McGregor | 2005-03-08 |
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2004-12-28 |
| 6792076 | Target steering system for EUV droplet generators | Michael B. Petach, Steven W. Fornaca | 2004-09-14 |
| 6744851 | Linear filament array sheet for EUV production | Michael B. Petach | 2004-06-01 |
| 6738452 | Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source | Roy D. McGregor, Robert A. Bunnell, Michael B. Petach | 2004-05-18 |
| 6657213 | High temperature EUV source nozzle | Michael B. Petach, Roy D. McGregor | 2003-12-02 |
| 6633048 | High output extreme ultraviolet source | — | 2003-10-14 |
| 6324256 | Liquid sprays as the target for a laser-plasma extreme ultraviolet light source | Roy D. McGregor, Michael B. Petach | 2001-11-27 |