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Systems and methods for tape advancement in laser produced plasma equipment |
Andrew Stone |
2008-09-09 |
| 7006540 |
Method and system for providing a pulse laser |
— |
2006-02-28 |
| 6999491 |
High intensity and high power solid state laser amplifying system and method |
Serge Cambeau |
2006-02-14 |
| 6977383 |
Method and apparatus for generating a membrane target for laser produced plasma |
I. C. Edmond Turcu, James Morris |
2005-12-20 |
| 6717101 |
Method and apparatus for laser ablation of a target material |
James Morris, Michael Powers |
2004-04-06 |
| 6472295 |
Method and apparatus for laser ablation of a target material |
James Morris, Michael Powers |
2002-10-29 |
| 6307913 |
Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation |
Richard M. Foster, Edmond Turcu, Jose Sasian, James Morris |
2001-10-23 |
| 6016324 |
Short pulse laser system |
Henry Shields, Richard M. Foster |
2000-01-18 |
| 5790574 |
Low cost, high average power, high brightness solid state laser |
Henry Shields, Richard M. Foster |
1998-08-04 |
| 5742634 |
Picosecond laser |
Henry Shields, Richard M. Foster |
1998-04-21 |
| 5491707 |
Low cost, high average power, high brightness solid state laser |
Henry Shields, Richard M. Foster |
1996-02-13 |
| 5434875 |
Low cost, high average power, high brightness solid state laser |
Henry Shields, Richard M. Foster |
1995-07-18 |