Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11151724 | Automatic detecting method and automatic detecting apparatus using the same | Tzu-Ping Kao, Chia-Chi Chang, Ju-Te Chen, Chen-Hui Huang, Cheng-Hsien Chen | 2021-10-19 |
| 10935969 | Virtual metrology system and method | Feng-Chi Chung, Yi-Chun Lin, Chien-Chuan Yu | 2021-03-02 |
| 10606253 | Method of monitoring processing system for processing substrate | Lian-Hua Shih, Chia-Chi Chang, Li-Ting Lin, Feng-Chi Chung, Meng-Chih Chang +3 more | 2020-03-31 |
| 10261504 | Virtual metrology system and method | Feng-Chi Chung, Yi-Chun Lin, Chien-Chuan Yu | 2019-04-16 |
| 7602003 | Semiconductor device structure for reducing hot carrier effect of MOS transistor | Min-Hsian Chen | 2009-10-13 |
| 7579250 | Method for reducing hot carrier effect of MOS transistor | Min-Hsian Chen | 2009-08-25 |
| 7285491 | Salicide process | Min-Hsian Chen | 2007-10-23 |
| 7238611 | Salicide process | Min-Hsian Chen | 2007-07-03 |
| 6265298 | Method for forming inter-metal dielectrics | Shuenn-Jeng Chen, Chih-Ching Hsu | 2001-07-24 |
| 6211097 | Planarization process | Shuenn-Jeng Chen | 2001-04-03 |
| 6133143 | Method of manufacturing interconnect | Jy-Hwang Lin, Yueh-Feng Ho, Chia-Chieh Yu | 2000-10-17 |
| 6100183 | Method for fabricating a via | William Lu, Tsung-Yuan Hung, Chi-Cheng Yang | 2000-08-08 |
| 6074941 | Method of forming a via with plasma treatment of SOG | William Lu, Chih-Ching Hsu, Yung-Chieh Kuo | 2000-06-13 |
| 5960321 | Method of forming a contact via | Chin-Ching Hsu, Chen-Chih Tsai, Jiunn-Hsien Lin | 1999-09-28 |