Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935969 | Virtual metrology system and method | Ching-Hsing Hsieh, Yi-Chun Lin, Chien-Chuan Yu | 2021-03-02 |
| 10606253 | Method of monitoring processing system for processing substrate | Lian-Hua Shih, Chia-Chi Chang, Li-Ting Lin, Ching-Hsing Hsieh, Meng-Chih Chang +3 more | 2020-03-31 |
| 10261504 | Virtual metrology system and method | Ching-Hsing Hsieh, Yi-Chun Lin, Chien-Chuan Yu | 2019-04-16 |