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Chih-Fan Hu, Chia-Wei Lee, En-Chan Chen, Shih-Wei Li |
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Micro-electro-mechanical system structure and method for fabricating the same |
Yuan-Sheng Lin, Jung-Hao Chang, Weng-Yi Chen |
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Semiconductor sensor and method of manufacturing the same |
Chih-Fan Hu, Chia-Wei Lee, Weng-Yi Chen |
2020-05-05 |
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Structure of gas sensor |
Chia-Wei Lee, Chih-Fan Hu, Chin-Jen Cheng, Chang-Hsin Wu |
2019-09-10 |
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Semiconductor device and method for manufacturing the same |
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2018-10-30 |
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Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the same |
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