Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421103 | Microelectromechanical system device | Chen-Hsiung Yang, Chun-Wen Cheng, Chia-Hua Chu | 2025-09-23 |
| 11577954 | Method for forming semiconductor device | Chen-Hsiung Yang, Chun-Wen Cheng, Chia-Hua Chu | 2023-02-14 |
| 11206493 | Sensor device and manufacturing method thereof | Chen-Hsiung Yang, Chun-Wen Cheng, Chia-Hua Chu | 2021-12-21 |
| 10865099 | MEMS device and method for forming the same | Chen-Hsiung Yang, Chun-Wen Cheng, Chia-Hua Chu | 2020-12-15 |
| 10793426 | Microelectromechanical system structure and method for fabricating the same | Chang-Sheng Hsu, Chih-Fan Hu, Chia-Wei Lee, Shih-Wei Li | 2020-10-06 |
| 10087072 | Microelectromechanical system structure including thermal stability layer whose material has higher growth temperature, and method for fabricating the same | Chang-Sheng Hsu, Chih-Fan Hu, Chia-Wei Lee, Shih-Wei Li | 2018-10-02 |
| 9961450 | Piezoresistive microphone and method of fabricating the same | Chang-Sheng Hsu, Weng-Yi Chen, Shih-Wei Li, Guo-Chih Wei | 2018-05-01 |