Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112176 | Freeze vacuum drying apparatus and freeze vacuum drying method | Haruhisa Nakano, Hirohiko Murakami, Tsuyoshi Yoshimoto, Masaki Itou, Takumi Komiya | 2021-09-07 |
| 8791433 | Ion implanting apparatus | Kazuhiro Watanabe, Tadashi Morita, Kenji Sato, Tsutomu Tanaka, Takuya Uzumaki | 2014-07-29 |
| 8440551 | Plasma doping method and manufacturing method of semiconductor device | Kazuhiko Tonari | 2013-05-14 |
| 8383496 | Plasma doping method and manufacturing method of semiconductor device | Kazuhiko Tonari | 2013-02-26 |
| 7847271 | Ion implanting apparatus | Seiji Ogata, Ryota Fukui, Hidekazu Yokoo | 2010-12-07 |
| 7511288 | Ion implantation device | Seiji Ogata, Yuzo Sakurada, Masayuki Sekiguchi | 2009-03-31 |
| 6930316 | Ion implantation system and ion implantation method | Junki Fujiyama, Yuzo Sakurada | 2005-08-16 |