Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7847271 | Ion implanting apparatus | Seiji Ogata, Hidekazu Yokoo, Tsutomu Nishihashi | 2010-12-07 |
| 4894546 | Hollow cathode ion sources | Kenichi Takagi, Riichi Kikuchi, Kazuo Takayama, Akira Tonegawa | 1990-01-16 |
| 4841197 | Double-chamber ion source | Kazuo Takayama, Eiji Yabe, Kenichi Takagi, Riichi Kikuchi | 1989-06-20 |