Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014946 | Electrostatic chuck, vacuum processing apparatus, and substrate processing method | Genji Sakata | 2024-06-18 |
| 7847271 | Ion implanting apparatus | Seiji Ogata, Ryota Fukui, Tsutomu Nishihashi | 2010-12-07 |
| 7777206 | Ion implantation device control method, control system thereof, control program thereof, and ion implantation device | Seiji Ogata, Masasumi Araki | 2010-08-17 |