Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777206 | Ion implantation device control method, control system thereof, control program thereof, and ion implantation device | Seiji Ogata, Hidekazu Yokoo | 2010-08-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777206 | Ion implantation device control method, control system thereof, control program thereof, and ion implantation device | Seiji Ogata, Hidekazu Yokoo | 2010-08-17 |