Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319630 | Deposition apparatus and deposition method | — | 2022-05-03 |
| 8440551 | Plasma doping method and manufacturing method of semiconductor device | Tsutomu Nishihashi | 2013-05-14 |
| 8383496 | Plasma doping method and manufacturing method of semiconductor device | Tsutomu Nishihashi | 2013-02-26 |
| 7642530 | Ion implantation apparatus and ion implanting method | Takeshi Shibata, Hiroshi Hashimoto, Tadahiko Hirakawa | 2010-01-05 |
| 7227159 | Ion implantation apparatus and ion implanting method | Takeshi Shibata, Hiroshi Hashimoto, Tadahiko Hirakawa | 2007-06-05 |