Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299874 | Coating apparatus and coating method | Hidenori Miyamoto, Koichi Misumi | 2016-03-29 |
| 9186696 | Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate | Hidenori Miyamoto, Kenji Maruyama, Koichi Misumi | 2015-11-17 |
| 8485126 | Coating apparatus including a glove part and a controller for stopping coating | Hidenori Miyamoto, Kenji Maruyama, Koichi Misumi | 2013-07-16 |
| 7642530 | Ion implantation apparatus and ion implanting method | Takeshi Shibata, Hiroshi Hashimoto, Kazuhiko Tonari | 2010-01-05 |
| 7227159 | Ion implantation apparatus and ion implanting method | Takeshi Shibata, Hiroshi Hashimoto, Kazuhiko Tonari | 2007-06-05 |