Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377286 | Device for globally measuring thickness of metal film | Xinchun Lu, Dewen Zhao, Zilian Qu, Qian Zhao, Yonggang Meng | 2016-06-28 |
| 9255780 | Method for measuring thickness of film on wafer edge | Xinchun Lu, Pan Shen | 2016-02-09 |
| 9138857 | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same | Xinchun Lu, Zhenjie Xu, Tongqing Wang, Pan Shen, Dewen Zhao +4 more | 2015-09-22 |