Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255780 | Method for measuring thickness of film on wafer edge | Xinchun Lu, Yongyong He | 2016-02-09 |
| 9138857 | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same | Xinchun Lu, Zhenjie Xu, Yongyong He, Tongqing Wang, Dewen Zhao +4 more | 2015-09-22 |
| 8912790 | Measuring device for measuring film thickness of silicon wafer | Xinchun Lu | 2014-12-16 |