Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9377286 | Device for globally measuring thickness of metal film | Xinchun Lu, Zilian Qu, Qian Zhao, Yongyong He, Yonggang Meng | 2016-06-28 |
| 9138857 | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same | Xinchun Lu, Zhenjie Xu, Yongyong He, Tongqing Wang, Pan Shen +4 more | 2015-09-22 |