Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12151335 | Monitoring method for chemical mechanical polishing and chemical mechanical polishing device | Tongqing Wang, Hui Ci, Qingbo Liang, Haiyang Xu, Rui Tan | 2024-11-26 |
| 12109664 | Method for determining thickness of metal film of wafer, polishing device, and medium | Yingming WU, Fangxin Tian, Jie Liu | 2024-10-08 |
| 10857646 | Apparatus for chemical-mechanical polishing | Zhenjie Xu, Jian Wang, Xiangyu Chen, Tongqing Wang, Kun Li | 2020-12-08 |
| 9377286 | Device for globally measuring thickness of metal film | Dewen Zhao, Zilian Qu, Qian Zhao, Yongyong He, Yonggang Meng | 2016-06-28 |
| 9255780 | Method for measuring thickness of film on wafer edge | Pan Shen, Yongyong He | 2016-02-09 |
| 9138857 | Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same | Zhenjie Xu, Yongyong He, Tongqing Wang, Pan Shen, Dewen Zhao +4 more | 2015-09-22 |
| 8912790 | Measuring device for measuring film thickness of silicon wafer | Pan Shen | 2014-12-16 |