Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4960656 | Devices and process for producing devices containing silicon nitride films | Chorng-Ping Chang, Dale E. Ibbotson, John A. Mucha | 1990-10-02 |
| 4918031 | Processes depending on plasma generation using a helical resonator | Dale E. Ibbotson, Wayne Johnson | 1990-04-17 |
| 4554047 | Downstream apparatus and technique | Joel M. Cook, Edward H. Mayer, Bernard C. Seiler | 1985-11-19 |
| 4498953 | Etching techniques | Joel M. Cook, Vincent M. Donnelly, Dale E. Ibbotson, John A. Mucha | 1985-02-12 |
| 4397711 | Crystallographic etching of III-V semiconductor materials | Vincent M. Donnelly, Dale E. Ibbotson | 1983-08-09 |
| 4394237 | Spectroscopic monitoring of gas-solid processes | Vincent M. Donnelly, Robert F. Karlicek, Jr. | 1983-07-19 |
| 4377436 | Plasma-assisted etch process with endpoint detection | Vincent M. Donnelly | 1983-03-22 |
| 4372834 | Purification process for compounds useful in optical fiber manufacture | Robert L. Barns, Edwin Arthur Chandross, Louis Thomas Manzione, Larry F. Thompson | 1983-02-08 |
| 4314875 | Device fabrication by plasma etching | — | 1982-02-09 |
| 4310380 | Plasma etching of silicon | Dan Maydan, David N. Wang | 1982-01-12 |