Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7556892 | Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method | Kimihiro Okada, Masahide Iwakata, Mikio Takagi, Yuichi Fukushima, Hiroki Yoshikawa +4 more | 2009-07-07 |
| 7351505 | Phase shift mask blank, phase shift mask, and pattern transfer method | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Yuichi Fukushima, Yoshihiro Ii +1 more | 2008-04-01 |
| 6774534 | Electrostatic actuator and method of driving the same | Toshikatsu Akiba, Akihiro Koga, Akihiro Kasahara | 2004-08-10 |
| 6750591 | Method of driving an electrostatic actuator | Toshikatsu Akiba, Akihiro Koga, Akihiro Kasahara | 2004-06-15 |
| 6680558 | Electrostatic actuator and method of driving the same | Toshikatsu Akiba, Akihiro Koga, Akihiro Kasahara | 2004-01-20 |
| 5935735 | Halftone phase shift mask, blank for the same, and methods of manufacturing these | Kinji Okubo, Tadashi Matsuo | 1999-08-10 |
| 4987851 | Apparatus for forming organic thin film | Satoshi Yasuda, Shigeru Wakayama, Yoshiaki Tsukumo, Syun Egusa | 1991-01-29 |