Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7351505 | Phase shift mask blank, phase shift mask, and pattern transfer method | Hiroki Yoshikawa, Yukio Inazuki, Satoshi Okazaki, Takashi Haraguchi, Yuichi Fukushima +1 more | 2008-04-01 |