Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4336438 | Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction | Akira Uehara, Hiroyuki Kiyota, Shigekazu Miyazaki | 1982-06-22 |
| 4318767 | Apparatus for the treatment of semiconductor wafers by plasma reaction | Isamu Hijikata, Akira Uehara | 1982-03-09 |
| 4277525 | Liquid compositions for forming silica coating films | Muneo Nakayama, Toshihiro Nishimura, Shozo Toda, Yoshio Hotta, Mitsuaki Minato | 1981-07-07 |
| 4268539 | Liquid coating composition for forming transparent conductive films and a coating process for using said composition | Muneo Nakayama, Toshihiro Nishimura, Akira Hashimoto, Teruo Kimura | 1981-05-19 |
| 4245154 | Apparatus for treatment with gas plasma | Akira Uehara, Hiroyuki Kiyota, Shozo Toda | 1981-01-13 |
| 4243740 | Light sensitive compositions of polymethyl isopropenyl ketone | Minoru Tsuda, Yoichi Nakamura, Hideo Nagata | 1981-01-06 |
| 4209581 | Soluble photosensitive resin composition | Hiroshi Takanashi, Toshimi Aoyama | 1980-06-24 |
| 4208159 | Apparatus for the treatment of a wafer by plasma reaction | Akira Uehara | 1980-06-17 |