Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7440881 | Adaptive correlation of pattern resist structures using optical metrology | Daniel E. Engelhard | 2008-10-21 |
| 7417750 | Consecutive measurement of structures formed on a semiconductor wafer using an angle-resolved spectroscopic scatterometer | Vi Vuong, Junwei Bao | 2008-08-26 |
| 7372583 | Controlling a fabrication tool using support vector machine | Wen Jin, Junwei Bao, Shifang Li | 2008-05-13 |
| 7126700 | Parametric optimization of optical metrology model | Junwei Bao, Vi Vuong, Daniel Prager | 2006-10-24 |
| 6791679 | Adaptive correlation of pattern resist structures using optical metrology | Daniel E. Engelhard | 2004-09-14 |