Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10823778 | Inspection system | Shuji Akiyama, Takeo Saito | 2020-11-03 |
| 7701236 | Each inspection units of a probe apparatus is provided with an imaging unit to take an image of a wafer | Shuji Akiyama, Tadashi Obikane, Masaru Suzuki, Yasuhito Yamamoto, Kazuya Yano +6 more | 2010-04-20 |