Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443942 | Plasma-assisted atomic layer epitaxy of cubic and hexagonal InN films and its alloys with AIN at low temperatures | Neeraj Nepal, Charles R. Eddy, Jr., Syed B. Qadri, Michael J. Mehl | 2022-09-13 |
| 11171055 | UV laser slicing of β-Ga2O3 by micro-crack generation and propagation | Robert E. Stahlbush, Marko J. Tadjer, Karl D. Hobart, Francis J. Kub | 2021-11-09 |
| 10403509 | Basal plane dislocation elimination in 4H—SiC by pulsed rapid thermal annealing | Marko J. Tadjer, Boris N. Feigelson, Robert E. Stahlbush, Eugene A. Imhoff, Jordan D. Greenlee | 2019-09-03 |
| 10020366 | Removal of basal plane dislocations from silicon carbide substrate surface by high temperature annealing and preserving surface morphology | Robert E. Stahlbush, Eugene A. Imhoff, Marko J. Tadjer | 2018-07-10 |
| 9129799 | Elimination of basal plane dislocations in post growth silicon carbide epitaxial layers by high temperature annealing while preserving surface morphology | Robert E. Stahlbush, Marko J. Tadjer, Eugene A. Imhoff, Boris N. Feigelson | 2015-09-08 |