Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9018088 | Method of manufacturing electrodes using carbon nanotube sheets | Jae Hak Kim, Gil Sik Lee, Kyung Hwan Lee | 2015-04-28 |
| 8409768 | Tuning of Fe catalysts for growth of spin-capable carbon nanotubes | Jae Hak Kim, Gil Sik Lee, Kyung Hwan Lee | 2013-04-02 |
| 8110990 | Atmospheric pressure plasma apparatus | Bum Ho Choi, Jong Ho Lee, Jung Chan Bae, Yong-Seok Park, Chun-seong Park +3 more | 2012-02-07 |
| 8012365 | Deep anisotropic silicon etch method | Remi Dussart, Philippe Lefaucheux, Xavier Mellhaoui, Pierre Ranson, Thomas Tillocher +1 more | 2011-09-06 |
| 6875700 | Ion-Ion plasma processing with bias modulation synchronized to time-modulated discharges | Sivananda K. Kanakasabapathy | 2005-04-05 |
| 6676800 | Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation | John J. Festa, Darryl A. Bennett, Joel Brad Bailey, Marwan H. Khater, Siva Kanakasabapathy | 2004-01-13 |
| 6459066 | Transmission line based inductively coupled plasma source with stable impedance | Marwan H. Khater | 2002-10-01 |
| 6097157 | System for ion energy control during plasma processing | Brian Andrew Smith | 2000-08-01 |
| 6028285 | High density plasma source for semiconductor processing | Marwan H. Khater, Blake E. Cherrington | 2000-02-22 |