Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6028285 | High density plasma source for semiconductor processing | Marwan H. Khater, Lawrence J. Overzet | 2000-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6028285 | High density plasma source for semiconductor processing | Marwan H. Khater, Lawrence J. Overzet | 2000-02-22 |