Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6676800 | Particle contamination cleaning from substrates using plasmas, reactive gases, and mechanical agitation | John J. Festa, Joel Brad Bailey, Lawrence J. Overzet, Marwan H. Khater, Siva Kanakasabapathy | 2004-01-13 |
| 5508519 | Mainshaft shield | Christian K. Forgey | 1996-04-16 |
| 5455426 | Target chamber shielding | Christian K. Forgey | 1995-10-03 |