Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10539589 | Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing | Israel Niv, Ronen Benzion | 2020-01-21 |
| 10175295 | Optical nanoprobing of integrated circuits | Mike Berkmyre | 2019-01-08 |
| 9891280 | Probe-based data collection system with adaptive mode of probing controlled by local sample properties | Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders | 2018-02-13 |
| 9506947 | System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing | Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders | 2016-11-29 |
| 9347897 | Characterizing dimensions of structures via scanning probe microscopy | Duncan Rogers | 2016-05-24 |
| 9057740 | Probe-based data collection system with adaptive mode of probing | Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders | 2015-06-16 |
| 9006001 | Simple scatterometry structure for Si recess etch control | Craig Hall | 2015-04-14 |
| 8895923 | System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing | Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders | 2014-11-25 |
| 8305097 | Method for calibrating an inspection tool | — | 2012-11-06 |
| 7921465 | Nanotip repair and characterization using field ion microscopy | — | 2011-04-05 |
| 7797991 | Rocking Y-shaped probe for critical dimension atomic force microscopy | — | 2010-09-21 |
| 7381950 | Characterizing dimensions of structures via scanning probe microscopy | Duncan Rogers | 2008-06-03 |
| 6967349 | Method for fabricating a multi-level integrated circuit having scatterometry test structures stacked over same footprint area | Thomas D. Bonifield | 2005-11-22 |