Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448154 | Method for producing wafers with rounded corners in the notches used for alignment in the fabrication of semiconductor devices | James Garvin, Moitreyee Mukerjee-Roy | 2002-09-10 |
| 6442867 | Apparatus and method for cleaning a vertical furnace pedestal and cap | William Pressnall, Frank Poag | 2002-09-03 |
| 6420792 | Semiconductor wafer edge marking | Keith Melcher, John P. Williston | 2002-07-16 |
| 6395102 | Method and apparatus for in-situ reticle cleaning at photolithography tool | Sima Salamati-Saradh, David R. Wyke | 2002-05-28 |
| 6305097 | Apparatus for in-situ reticle cleaning at photolithography tool | Sima Salamati-Saradh, David R. Wyke | 2001-10-23 |
| 6298282 | Robot crash sensor system | Robin D. Worley, Keith Melcher | 2001-10-02 |
| 6267122 | Semiconductor cleaning solution and method | Jeffrey W. Ritchison | 2001-07-31 |
| 6267894 | Method for efficient filtration of chemical baths | Vikram N. Doshi, James Drumm | 2001-07-31 |
| 6239003 | Method of simultaneous fabrication of isolation and gate regions in a semiconductor device | Kalipatnam Vivek Rao, Kueing-Long Chen | 2001-05-29 |
| 6202318 | System for processing wafers and cleaning wafer-handling implements | Jimmie Brooks | 2001-03-20 |
| 6197123 | Method for cleaning a process chamber used for manufacturing substrates during nonproduction intervals | Frank Poag | 2001-03-06 |
| 6180424 | Method for improving wafer sleuth capability by adding wafer rotation tracking | Howard L. Tigelaar | 2001-01-30 |
| 6174817 | Two step oxide removal for memory cells | Vikram N. Doshi, Hiro Tomomatsu, Roy D. Clark | 2001-01-16 |
| 6096100 | Method for processing wafers and cleaning wafer-handling implements | Jimmie Brooks | 2000-08-01 |
| 6067163 | Automated substrate pattern recognition system | Douglas E. Paradis | 2000-05-23 |
| 5958517 | System and method for cleaning nozzle delivering spin-on-glass to substrate | Frank Poag, Douglas E. Paradis, Paul C. Hashim | 1999-09-28 |
| 5839455 | Enhanced high pressure cleansing system for wafer handling implements | Virgil Q. Turner, William D. Light, Hilario T. Trevino, Frank Poag, Douglas E. Paradis | 1998-11-24 |
| 5841543 | Method and apparatus for verifying the presence of a material applied to a substrate | Douglas E. Paradis | 1998-11-24 |
| 5698038 | Method for wafer carrier cleaning | Robert F. Kunesh | 1997-12-16 |
| 5698040 | Method for rotational wafer cleaning in solution | Robert F. Kunesh | 1997-12-16 |
| 5576230 | Method of fabrication of a semiconductor device having a tapered implanted region | — | 1996-11-19 |
| 5551165 | Enhanced cleansing process for wafer handling implements | Virgil Q. Turner, William D. Light, Hilario T. Trevino, Frank Poag, Douglas E. Paradis | 1996-09-03 |
| 5547891 | Structural modification to enhance DRAM gate oxide quality | — | 1996-08-20 |
| 5535471 | Tool for cleaning LPCVD furnace tube | — | 1996-07-16 |
| 5525529 | Method for reducing dopant diffusion | — | 1996-06-11 |