Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5520205 | Apparatus for wafer cleaning with rotation | Robert F. Kunesh | 1996-05-28 |
| 5506169 | Method for reducing lateral dopant diffusion | — | 1996-04-09 |
| 5334556 | Method for improving gate oxide integrity using low temperature oxidation during source/drain anneal | — | 1994-08-02 |