Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4820377 | Method for cleanup processing chamber and vacuum process module | Cecil J. Davis, Robert T. Matthews, Lee M. Loewenstein | 1989-04-11 |
| 4758305 | Contact etch method | Thomas D. Bonifield, Vic B. Marriott, Monte A. Douglas | 1988-07-19 |
| 4685999 | Apparatus for plasma assisted etching | Cecil J. Davis, Duane E. Carter | 1987-08-11 |
| 4659413 | Automated single slice cassette load lock plasma reactor | Cecil J. Davis, John E. Spencer, Randall E. Johnson, Frederick W. Brown, Stanford P. Kohan | 1987-04-21 |
| 4502915 | Two-step plasma process for selective anisotropic etching of polycrystalline silicon without leaving residue | Duane E. Carter | 1985-03-05 |