Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11148939 | Stress compensation for piezoelectric optical MEMS devices | YungShan Chang, Ricky Alan Jackson, Jeff W. Ritchison | 2021-10-19 |
| 10319899 | Method of forming a semiconductor device | Xin Li, Joel Soman, Thomas Warren Lassiter, Mary Alyssa Drummond Roby, YungShan Chang | 2019-06-11 |
| 10009001 | Devices with specific termination angles in titanium tungsten layers and methods for fabricating the same | Maciej Blasiak, Nicholas Stephen Dellas, Brian E. Goodlin | 2018-06-26 |
| 9939710 | High-temperature isotropic plasma etching process to prevent electrical shorts | Joel Soman, Thomas Warren Lassiter, Mary Alyssa Drummond Roby, Nayeemuddin Mohammed, YungShan Chang | 2018-04-10 |
| 9890040 | Stress compensation for piezoelectric optical MEMS devices | YungShan Chang, Ricky Alan Jackson, Jeff W. Ritchison | 2018-02-13 |
| 9755139 | Piezoeletric wet etch process with reduced resist lifting and controlled undercut | Xin Li, Joel Soman, Thomas Warren Lassiter, Mary Alyssa Drummond Roby, YungShan Chang | 2017-09-05 |
| 9716013 | Sloped photoresist edges for defect reduction for metal dry etch processes | Elizabeth Costner Stewart, Yung Shan Chang, Ricky Alan Jackson | 2017-07-25 |
| 9660603 | Sloped termination in molybdenum layers and method of fabricating | Elizabeth Costner Stewart, Nicholas Stephen Dellas | 2017-05-23 |
| 9524881 | Method for fabricating specific termination angles in titanium tungsten layers | Maciej Blasiak, Nicholas Stephen Dellas, Brian E. Goodlin | 2016-12-20 |
| 9405089 | High-temperature isotropic plasma etching process to prevent electrical shorts | Joel Soman, Thomas Warren Lassiter, Mary Alyssa Drummond Roby, Nayeemuddin Mohammed, YungShan Chang | 2016-08-02 |
| 9304283 | Bond-pad integration scheme for improved moisture barrier and electrical contact | Joel Soman, Scott R. Summerfelt, Thomas Warren Lassiter, Nayeemuddin Mohammed, Mary Alyssa Drummond Roby | 2016-04-05 |