Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6605536 | Treatment of low-k dielectric films to enable patterning of deep submicron features | Guoqiang Xing, Kenneth D. Brennan, Hyesook Hong | 2003-08-12 |
| 6579798 | Processes for chemical-mechanical polishing of a semiconductor wafer | Basab Chatterjee, Chad Kaneshige, Vincent C. Korthuis, Barry Lanier, Satyavolu Papa Rao | 2003-06-17 |
| 6551943 | Wet clean of organic silicate glass films | Troy A. Yocum | 2003-04-22 |
| 6383928 | Post copper CMP clean | — | 2002-05-07 |
| 6316350 | Post fuse slag etch | Troy A. Yocum | 2001-11-13 |
| 6150010 | Integrated circuit insulator | — | 2000-11-21 |
| 6030706 | Integrated circuit insulator and method | Justin Gaynor | 2000-02-29 |
| 5888905 | Integrated circuit insulator and method | Kelly Taylor | 1999-03-30 |
| 5828132 | Semiconductor device having perfluorinated and non-fluorinated parylene intermetal dielectric | — | 1998-10-27 |