| 7901106 |
Solid-state illuminator for display applications |
Walter M. Duncan, John David Jackson |
2011-03-08 |
| 7106491 |
Split beam micromirror |
Thomas J. Meyer, Brett A. Mangrum, Mark F. Reed, James D. Huffman, Wei-Yan Shih |
2006-09-12 |
| 5867202 |
Micromechanical devices with spring tips |
Richard L. Knipe, Mark Strumpell |
1999-02-02 |
| 5605489 |
Method of protecting micromechanical devices during wafer separation |
Richard O. Gale |
1997-02-25 |
| 5597767 |
Separation of wafer into die with wafer-level processing |
Laurinda Ng, Ronald S. Croff, Robert G. McKenna, Lawrence D. Dyer |
1997-01-28 |
| 5527744 |
Wafer method for breaking a semiconductor |
Rafael C. Alfaro |
1996-06-18 |
| 5452138 |
Deformable mirror device with integral color filter |
Brooks J. Story |
1995-09-19 |
| 5445559 |
Wafer-like processing after sawing DMDs |
Richard O. Gale |
1995-08-29 |
| 5393706 |
Integrated partial sawing process |
Rafael C. Alfaro |
1995-02-28 |
| 5389182 |
Use of a saw frame with tape as a substrate carrier for wafer level backend processing |
— |
1995-02-14 |
| 5240818 |
Method for manufacturing a color filter for deformable mirror device |
Brooks J. Story |
1993-08-31 |
| 5226099 |
Digital micromirror shutter device |
Jeffrey B. Sampsell, R. Mark Boysel |
1993-07-06 |