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1998-10-27 |
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James M. Florence |
1997-02-25 |
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1996-06-04 |
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1995-05-02 |
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Method of forming a vacuum micro-chamber for encapsulating a microelectronics device |
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1994-10-11 |
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Vacuum microelectronics device |
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1994-09-20 |
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1994-09-06 |
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James M. Florence |
1994-05-17 |
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Vacuum micro-chamber for encapsulating a microelectronics device |
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1993-12-14 |
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1993-07-06 |