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Divergent charged particle implantation for improved transistor symmetry |
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2010-10-05 |
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Method for implanter angle verification and calibration |
Duofeng Yue, Jiejie Xu, Thomas Patrick Conroy |
2008-07-08 |
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Divergent charged particle implantation for improved transistor symmetry |
James D. Bernstein, Lance Robertson, Said Ghneim, Jiejie Xu |
2008-06-10 |
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Method for implanting dopants within a substrate by tilting the substrate relative to the implant source |
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Method for varying the uniformity of a dopant as it is placed in a substrate by varying the speed of the implant across the substrate |
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Method for improving a drive current for semiconductor devices on a wafer-by-wafer basis |
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