Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6838300 | Chemical treatment of low-k dielectric films | Changming Jin, Phillip D. Matz, Patricia B. Smith, Andrew John McKerrow | 2005-01-04 |
| 6713402 | Methods for polymer removal following etch-stop layer etch | Patricia B. Smith | 2004-03-30 |
| 6645781 | Method to determine a complete etch in integrated devices | Ping Jiang | 2003-11-11 |