Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638877 | Ultra-thin SiO2using N2O as the oxidant | — | 2003-10-28 |
| 6544906 | Annealing of high-k dielectric materials | Mark Visokay, Luigi Colombo | 2003-04-08 |
| 6342446 | Plasma process for organic residue removal from copper | Patricia B. Smith | 2002-01-29 |
| 6261934 | Dry etch process for small-geometry metal gates over thin gate dielectric | Robert J. Kraft | 2001-07-17 |
| 6153018 | Metal rinsing process with controlled metal microcorrosion reduction | Rita Vos, Mark Heyns | 2000-11-28 |
| 5948702 | Selective removal of TixNy | — | 1999-09-07 |