Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7407601 | Polymeric particle slurry system and method to reduce feature sidewall erosion | Shen-Nan Lee, Ying-Ho Chen, Syun-Ming Jang | 2008-08-05 |
| 7253524 | Copper interconnects | Zhen-Cheng Wu, Weng Chang, Yung-Cheng Lu, Syun-Ming Jang, Mong-Song Liang | 2007-08-07 |
| 6924238 | Edge peeling improvement of low-k dielectric materials stack by adjusting EBR resistance | Syun-Ming Jang, Ying-Ho Chen, Shen-Nan Lee | 2005-08-02 |
| 6919276 | Method to reduce dishing and erosion in a CMP process | Shen-Nan Lee, Ying-Ho Chen, Syun-Ming Jang, Jin-Yiing Song | 2005-07-19 |