Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7829815 | Adjustable electrodes and coils for plasma density distribution control | Ying Chen, Chi-An Kao, Yi-Li Hsiao, Chen-Hua Yu, Jean Wang +1 more | 2010-11-09 |
| 7588946 | Controlling system for gate formation of semiconductor devices | Chia-Tsung Tso, Jiun-Hong Lai, Mei-Jen Wu, Li-Te Hsu, Pin Chia Su | 2009-09-15 |
| 7563719 | Dual damascene process | Tzu-Chan Weng, Chien-Chung Chen | 2009-07-21 |