Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409529 | Vacuum assembly for chemical mechanical polishing | Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin, Szu-Cheng Wang, Chun-Jui Chu | 2025-09-09 |
| 12076831 | Chemical mechanical polishing apparatus and method | Yu-Chen Wei, Jheng-Si SU, Shih-Ho Lin, Chun-Chieh Chan | 2024-09-03 |
| 12009222 | Method for forming semiconductor device structure | Yu-Chen Wei, Chun-Chieh Chan, Chun-Jui Chu, Shih-Ho Lin | 2024-06-11 |
| 11685015 | Method and system for performing chemical mechanical polishing | Chih-Yuan Yang, Huai-Tei Yang, Yu-Chen Wei, Szu-Cheng Wang, Li-Hsiang Chao +1 more | 2023-06-27 |
| 11673223 | Chemical mechanical polishing method | Yu-Chen Wei, Jheng-Si SU, Shih-Ho Lin, Chun-Chieh Chan | 2023-06-13 |
| 11292101 | Chemical mechanical polishing apparatus and method | Yu-Chen Wei, Jheng-Si SU, Shih-Ho Lin, Chun-Chieh Chan | 2022-04-05 |
| 11251063 | Article transporter in semiconductor fabrication | Jheng-Si SU, Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin | 2022-02-15 |
| 11239092 | Method for forming semiconductor device structure | Yu-Chen Wei, Chun-Chieh Chan, Chun-Jui Chu, Shih-Ho Lin | 2022-02-01 |
| 11094554 | Polishing process for forming semiconductor device structure | Shih-Ho Lin, Jheng-Si SU, Zhi-Sheng Hsu, Po-ting Huang | 2021-08-17 |
| 10843307 | Vacuum assembly for chemical mechanical polishing | Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin, Szu-Cheng Wang, Chun-Jui Chu | 2020-11-24 |
| 10804133 | Article transferring method in semiconductor fabrication | Jheng-Si SU, Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin | 2020-10-13 |
| 10636673 | Method for forming semiconductor device structure | Yu-Chen Wei, Chun-Chieh Chan, Chun-Jui Chu, Shih-Ho Lin | 2020-04-28 |
| 10170343 | Post-CMP cleaning apparatus and method with brush self-cleaning function | Yu-Chen Wei, Chun-Jui Chu, Chun-Chieh Chan, Shih-Ho Lin | 2019-01-01 |