Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409529 | Vacuum assembly for chemical mechanical polishing | Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin, Jen-Chieh LAI, Chun-Jui Chu | 2025-09-09 |
| 11685015 | Method and system for performing chemical mechanical polishing | Chih-Yuan Yang, Huai-Tei Yang, Yu-Chen Wei, Li-Hsiang Chao, Jen-Chieh LAI +1 more | 2023-06-27 |
| 10843307 | Vacuum assembly for chemical mechanical polishing | Yu-Chen Wei, Chih-Yuan Yang, Shih-Ho Lin, Jen-Chieh LAI, Chun-Jui Chu | 2020-11-24 |