Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7105446 | Apparatus for pre-conditioning CMP polishing pad | Chia-Che Chuang, Wen-Chih Chiou, Liang-Guang Chen | 2006-09-12 |
| 6962869 | SiOCH low k surface protection layer formation by CxHy gas plasma treatment | Tien-I Bao, Lih-Ping Li, Chung-Chi Ko, Aaron Song, Syun-Ming Jang | 2005-11-08 |
| 6770570 | Method of forming a semiconductor device with a substantially uniform density low-k dielectric layer | Lih-Ping Li, Syun-Ming Jang | 2004-08-03 |
| 6677251 | Method for forming a hydrophilic surface on low-k dielectric insulating layers for improved adhesion | Aaron Song, Tien-I Bao, Syun-Ming Jang | 2004-01-13 |