Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011402 | Transport system of semiconductor fabrication facility, associated movable container and method | Fu-Hsien Li, Chi-Feng Tung | 2021-05-18 |
| 11001442 | Stocking system | Guan-Cyun Li, Chi-Feng Tung, Fu-Hsien Li | 2021-05-11 |
| 10879093 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Sheng-Kang Yu, Chi-Feng Tung, Guancyun Li | 2020-12-29 |
| 10840121 | Method and apparatus for unpacking semiconductor wafer container | Fu-Hsien Li, Chi-Feng Tung, Chi-Yuan Chu, Jen-Ti Wang | 2020-11-17 |
| 10703563 | Stocker | Guan-Cyun Li, Chi-Feng Tung, Fu-Hsien Li | 2020-07-07 |
| 10504760 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Sheng-Kang Yu, Chi-Feng Tung, Guancyun Li | 2019-12-10 |
| 10403532 | Semiconductor apparatus with inner wafer carrier buffer and method | Jason Shen, Wen-Yu Huang, Li-Jen Ko | 2019-09-03 |
| 10043699 | High capacity overhead transport (OHT) rail system with multiple levels | Fu-Hsien Li, Chi-Feng Tung | 2018-08-07 |
| 9921493 | Photolithography system, method for transporting photo-mask and unit therein | Chi-Feng Tung, Mao-Lin Kao, Chih-Cheng Hsiao | 2018-03-20 |
| 9915943 | System and method of monitoring an environmental parameter along a predetermined route | Wei Wang | 2018-03-13 |
| 9852932 | Method for processing semiconductor wafer | Mao-Lin Kao, Hsu-Shui Liu, Jiun-Rong Pai, Li-Jen Ko, Tien-Chen Hu | 2017-12-26 |
| 9558974 | Semiconductor processing station and method for processing semiconductor wafer | Mao-Lin Kao, Hsu-Shui Liu, Tien-Chen Hu, Li-Jen Ko, Jiun-Rong Pai | 2017-01-31 |
| 9305815 | Automated material handling system and method for semiconductor manufacturing | Chi-Feng Tung, Mao-Lin Kao, Chin-Hsiang Lin | 2016-04-05 |
| 8751045 | System and method of monitoring an environmental parameter along a predetermined route | Wei Wang | 2014-06-10 |