Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8239788 | Frame cell for shot layout flexibility | Chih-Wei Lin, Yung-Cheng Chen | 2012-08-07 |
| 8183701 | Structure of stacking scatterometry based overlay marks for marks footprint reduction | Chi-Yuan Shih, Sophia Wang, Heng-Hsin Liu | 2012-05-22 |
| 8101340 | Method of inhibiting photoresist pattern collapse | Ching-Yu Chang, Chin-Hsiang Lin, Hua-Tai Lin, Kuei-Shun Chen, Bang-Chein Ho +4 more | 2012-01-24 |
| 8101530 | Lithography patterning method | I-Hsiung Huang, Chin-Hsiang Lin, Heng-Hsin Liu | 2012-01-24 |
| 7901854 | Wafer edge exposure unit | Po-Chang Huang, Heng-Hsin Liu | 2011-03-08 |
| 7393616 | Line end spacing measurement | Jiann Yuan Huang, Anderson Chang, Chih-Ming Ke, Chin-Hsiang Lin, Tsai-Sheng Gau | 2008-07-01 |